Hot/Cold temperature prober for 8 inch and 12 inch wafer.
The temperature control system we developed realizes the efficient temperature control by eliminating the evaporation of cooling medium and maintains the conventional extensibility.
PFC original XY Position Compensation function and Profile function lead to high precision probing by compensating position of wafer changed due to temperature change.
FEATURES
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Wafer Size : 8 inch to 12 inch
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Temperature Control Range : -50℃ to 180℃
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XY precision & compensation based on sampling
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Small footprint : W1740mm x D1000mm (chiller not included)
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Prober and Chiller are separable with quick connector
