PCP-102WS | Wafer Prober | Plum Five Semiconductor Equipment

Double Sided Wafer Prober

PCP-102WS

Outline

The PCP-102WS is a high precision prober designed to contact both sides (double side) of wafer.
By adopting PFC original XY Compensation and Profiling function, PCP-102WS can compensate the position even if a wafer is warped.
Accurate RDS (on-resistance) is measured by making Kelvin connection at the drain side on the back of wafer and adjusting its drain-sense-position to the source-sense-position.

FEATURES

・	Contacts both sides (double side) of wafer
・	Effective position compensation for the warpage of wafer
・	Successful record 100% of Alignment for customers' products (Record only in Japan)
・	Measures the accurate RDS (on-resistance)
・	Probing at more than two points by moving in a chip (Micro Probing)
・	Large current/High voltage probing is supported by the wafer clamp system with ceramic blade
・	Low noise： More than -80dB on the chuck (Reference Value: 30KHZ to 30MHZ　Loop ANT actual measurement)
・	High rigidity cabinet made by the iron surface plate and the welding frame realizes low vibration
・	Low cost and High throughput
・	Small space (Footprint), power-saving design
・	Stable operation (more than MTBF5000 hours)

OPTIONS

・	Large diameter Pre-alignment chuck can handle a warped wafer, thin wafer and TAIKO™ Wafer

SPECIFICATION

Wafer size	100mm (4 inch) to 200mm (8 inch)
Probing area	Wafer: φ200mm
XY stage	Driven by linear motor　(Repeat accuracy:1um)
Footprint	Small space: (W)1200mm × (D)860mm

OTHERS

・	Sales achievement: PCP series more than 500 sets (As of April 2022)
・	We can respond to the request from a customer flexibly.
・	We can offer discount for the purchase of several sets together.

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