| PRODUCT NAME |
PCP-103SL |
PCP-303N |
| PRODUCT IMAGE |
 |
 |
|
|
|
| FEATURES |
Development
concept |
| Probing solution for the diced device WLCSP or Packaged Substrate (BGA,
QFN, etc) by our original concept probing method. |
|
Image
Processing |
| XY Compensation (PFC original method) and Profiling perform Multi-die Probing
by compensating the position shift by "warpage" or "sag"
of film caused by film tension and dicer blade. |
|
| Record of Alignment success for customers' products is 100%. (In Japan) |
| Probing |
Multi-area probing is available when more than two package substrates are on a film frame.
Reconstructed wafer can be probed by the individual alignment. |
|
| Capable of Multi-TEG (more than 2 different kinds on a wafer), etc. by
probing in a chip (Micro Probing). |
|
Transfer
section |
| The ring clamp method which is not affected by the influence of the sag
of a film is used. |
|
| Quick Loader can reduce the Load/Unload time per sheet to half. (OP) |
|
| Chuck |
Small chip less than 1mm is handled by minor diameter VAC holes.
Small chip less than 0.5mm can be handled. (OP)
Sandblast finish of chuck surface and chuck air-blow-mechanism improve the detachability from the chuck. |
|
| Supports the high temperature range 50 ℃ to 150 ℃ and precise thermal control 25℃±0.3℃. (OP) |
|
| Noise |
Surface of the chuck: More than－80db (*1) |
Low
Vibration |
High rigidity cabinet made by the iron surface plate and the welding frame |
| Non-magnetic |
Non-magnetic spec is available for a magnetic device. (OP)(*2) |
| Common |
・Low cost, high throughput
・Small space (footprint), power-saving design
・Stable operation (more than MTBF5000 hours) |
|
|
|
|
|
| SPEC |
Film Frame
Size |
2-8-1(φ200mm wafer)
Supports 2-6-1 by changing chuck (OP)
Supports Eco-ring and square ring (OP) |
2-12(φ300mm wafer)
Supports 2-8-1 by changing chuck (OP)
Supports Eco-ring and square ring (OP) |
| Probing Area |
Wafer：φ200mm
Max: (X)214mm, (Y)214mm
(※Contact us for detail) |
Wafer：φ300mm
Max: (X) 300mm, (Y) 300mm |
| XY Stage |
Driven by linear motor (Repeat accuracy：1um) |
| Foot Print |
Small space：
(W) 1200mm × (D) 860mm |
Small space：
(W) 1615mm × (D) 1000mm |
|
|
|
|
| OTHERS |
・Total： PCP series more than 430 sets (As of April 2018)
・We can respond to your request flexibly.
・We can offer special price for the purchase of several sets together. |
|
