PCP-302N | Wafer Prober | Plum Five Semiconductor Equipment

Wafer Prober

PCP-302N

Outline

The PCP-302N is a wafer prober developed to respond to our customer's request flexibly on the basis of our experience and technology.
By adopting PFC original XY Compensation and Profiling function, PCP-302N can compensate the position even for the wafer's expansion caused by the temperature.

FEATURES

・	Effective compensation even for the wafer's expansion caused by the temperature.
・	Successful record of Alignment for customers' products is 100%. (Record only in Japan)
・	Probing more than two points by moving in a chip (Micro Probing)
・	Surface finish for your intended usage, such as gold plate, nickel plate, etc.
・	Low noise: More than -80dB on the chuck 　(Reference Value: 30KHZ to 30MHZ　Loop ANT actual measurement)
・	High rigidity cabinet made by the iron surface plate and the welding frame realizes low vibration
・	Low cost and High throughput
・	Small space (Footprint), power-saving design
・	Stable operation (more than MTBF5000 hours)

OPTIONS

・	Supports chip probing by the wafer adapter.
・	Large diameter Pre-alignment chuck can handle a warped wafer, thin wafer and TAIKO™ Wafer
・	Quick Loader can reduce the Load/Unload time per sheet to half.
・	Capable of the high temperature range (50 ℃ to 150 ℃) and the precise thermal control (25℃±0.3℃).
・	Capable of the high temperature range (50 ℃ to 150 ℃) and the precise thermal control (25℃±0.3℃).
	※Reference value (standard system): Chuck surface: 0.04mT 　　　　　　　　　　　　　　　　　　　Transporting rout: 0.2mT

SPECIFICATION

Wafer size	200mm (8 inch) to 300mm (12 inch)
Probing area	Wafer: φ300mm
XY stage	Driven by linear motor　(Repeat accuracy:1um)
Footprint	Small space: (W)1615mm × (D)1000mm

OTHERS

・	Sales achievement: PCP series more than 500 sets (As of April 2022)
・	We can respond to the request from a customer flexibly.
・	We can offer discount for the purchase of several sets together.

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