Top Products Wafer Prober PCP-102SL

Wafer Prober


The PCP-102SL is a prober designed for wafer probing, aiming at the low cost and high throughput.
By adopting PFC original XY Compensation and Profiling function, PCP-102SL can compensate the position even for the expansion of wafer caused by the temperature.


Effective position compensation even for the wafer's expansion caused by the temperature.
Successful record of Alignment for customers' products is 100%. (Record only in Japan)
Probing more than two points by moving in a chip (Micro Probing)
Surface finish for your intended usage, such as gold plate, nickel plate, etc.
Low noise: More than -80dB on the chuck
(Reference Value: 30KHZ to 30MHZ Loop ANT actual measurement)
High rigidity cabinet made by the iron surface plate and the welding frame realizes low vibration
Low cost and High throughput
Small space (Footprint), power-saving design
Stable operation (more than MTBF5000 hours)


Supports chip probing by the wafer adapter.
Large diameter Pre-alignment chuck can handle a warped wafer, thin wafer and TAIKO™ Wafer
Quick Loader can reduce the Load/Unload time per sheet by half.
Capable of the high temperature range (50 ℃ to 150 ℃) and the precise thermal control (25℃±0.3℃).
Non-magnetic spec to handle a magnetic device.
※Reference value (standard system): Chuck surface: 0.04mT
                   Transporting rout: 0.2mT


Wafer size 100mm (4 inch) to 200mm (8 inch)
Probing area Wafer: φ200mm
XY stage Driven by linear motor (Repeat accuracy:1um)
Footprint Small space: (W)1200mm × (D)860mm


Sales achievement: PCP series more than 500 sets (As of April 2022)
We can respond to the request from a customer flexibly.
We can offer discount for the purchase of several sets together.

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